May 19, 2012

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ESD effects (3 posts)

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  • Avatar Image said 3 years, 1 month ago:

    Hi,speaking of ESD issues, in the optical lithography, the mask damage from electrostatic discharge (ESD) has long been a concern, and it is expected to be even more problematic as mask feature sizes shrink. It is critial to get rid of ESD effects.

  • Avatar Image said 3 years, 1 month ago:


    Hi,speaking of ESD issues, in the optical lithography, the mask damage from electrostatic discharge (ESD) has long been a concern, and it is expected to be even more problematic as mask feature sizes shrink. It is critial to get rid of ESD effects.

    That's true, when the flask is dry up by the heat vaccum, it always has the damn static, and i fill the particles of chemical materials inside, they will stick to either the edges or the outside, do you know how i can get around this issue?

  • Avatar Image said 3 years, 1 month ago:

    that's easy, you can use some conductvie materials like metals to touch the flasks before you use that.

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